Design and fabrication of micro needles array based on UV-LIGA technology

被引：0
|
作者：
机构：
[1] Liao, Zhe-Xun
[2] Li, Yi-Gui
[3] Zhu, Jun
来源：
Li, Y.-G. (ygli@sjtu.edu.cn) | 1848年 / Shanghai Jiaotong University卷 / 46期
关键词：
6;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Formation of thick SU-8 mold for the fabrication of UV-LIGA based nickel micro-gyroscope structures
    Jain, Ankush
    Gopal, Ram
    INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2014, 44 (04): : 330 - 335
  • [32] Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process
    Ming, Ping-Mei
    Zhu, Di
    Zhou, Feng
    Hu, Yang-Yang
    Zeng, Yong-Bin
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2009, 17 (06): : 1267 - 1273
  • [33] Implementation of eddy current sensor using UV-LIGA technology
    Zheng, Xiaohu
    Zhu, Di
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2007, 18 (18): : 2156 - 2159
  • [34] Contrastive Study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology
    Li Hua
    Shi Gengchen
    MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 6836
  • [35] Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA
    Mahmood, Md. Sohel
    Celik-Butler, Zeynep
    Butler, Donald P.
    SENSORS AND ACTUATORS A-PHYSICAL, 2017, 263 : 530 - 541
  • [36] Linear micromotors and spatial micromechanisms based on UV-LIGA
    Cheng, WJ
    DeVoe, DL
    MEMS 2005 Miami: Technical Digest, 2005, : 399 - 402
  • [37] Fabrication of PMMA Microchip of Capillary Electrophoresis by Optimized UV-LIGA Process
    Zhu, Xuelin
    Liu, Gang
    Xiong, Ying
    Guo, Yuhua
    Tian, Yangchao
    INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 875 - 879
  • [38] Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology
    Ma, Yali
    Liu, Wenkai
    Liu, Chong
    NANOTECHNOLOGY AND PRECISION ENGINEERING, 2019, 2 (02) : 83 - 88
  • [39] A fast switching bistable electromagnetic microactuator fabricated by UV-LIGA technology
    Zhang, Yong-hua
    Ding, Gui-fu
    Fu, Shi
    Cai, Bing-chu
    MECHATRONICS, 2007, 17 (2-3) : 165 - 171
  • [40] Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology
    Yali Ma
    Wenkai Liu
    Chong Liu
    NanotechnologyandPrecisionEngineering, 2019, 2 (02) : 83 - 88
12345