Monte Carlo simulation study of scanning electron microscopy images of rough surfaces

被引：0
|
作者：
Li, Y.G. [1 ]
Mao, S.F. [1 ]
Li, H.M. [2 ]
Xiao, S.M. [1 ]
Ding, Z.J. [1 ]
机构：
[1] Hefei National Laboratory for Physical Sciences at Microscale, Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China
[2] USTC-HP Laboratory of High Performance Computing, University of Science and Technology of China, Hefei 230026, Anhui, China
来源：
Journal of Applied Physics | 2008年 / 104卷 / 06期
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