Development of vertical electrostatic comb-drive actuator using magnified cascade configuration

被引：0
|
作者：
Chiou, Jin-Chern [1 ]
Kuo, Chin-Fu [1 ]
机构：
[1] Department of Electrical and Control Engineering, National Chiao Tung University, Hsinchu 300, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 10 A期
关键词：
In this study; a vertical electrostatic comb-drive actuator with a novel cascade configuration called cascade vertical combdrive actuator (CVCA) is developed to magnify the actuation stroke. The CVCA combines vertical comb-drive actuators and multi-stage structures to form a stacked actuation configuration that can be used to overcome the stroke constraint of the traditional vertical comb-drive actuator. To implement the CVCA; the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 μm two polysilicon layers and four metal layers (2p4m) complementary metal-oxide-semiconductor (CMPS) fabrication processes and post-CMCS micromachining steps are employed to fabricate the device. Due to the multilayer characteristic of the microstructure; the proposed CVCA can achieve the vertical motion and cascade structures. The experimental results indicated that the stroke of the proposed CVCA can be magnified three times as compared with that of the standard vertical comb drive with the same chip size. © 2007 The Japan Society of Applied Physics;
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摘要：
Journal article (JA)
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页码：6546 / 6549
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