Bulk acoustic wave analysis of crystalline plane oriented ZnO films

被引:0
|
作者
Wu, Sean [1 ]
Lin, Zhi-Xun [2 ]
Lee, Maw-Shung [2 ]
Ro, Ruyen [3 ]
机构
[1] Department of Electronics Engineering and Computer Sciences, Tung-Fang Institute of Technology, 110 Tung-Fung Road, Hunei Shiang, Kaohsiung 829, Taiwan
[2] Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan
[3] Department of Communication Engineering, I-Shou University, 1, Hsueh-Cheng Road, Ta-Hsu Hsiang, Kaohsiung 840, Taiwan
来源
Journal of Applied Physics | 2007年 / 102卷 / 08期
关键词
Zinc oxide;
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