HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature

被引：3
|
作者：
Ahn, Soeun [1 ,2 ]
Jeong, Eunbi [1 ,2 ]
Jeon, Kyoungho [1 ,2 ]
Lim, Sang Ho [2 ]
Han, Seunghee [1 ]
机构：
[1] National Security & Disaster Safety Technology Group, Korea Institute of Science and Technology, 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul,02792, Korea, Republic of
[2] Department of Material Science and Engineering, Korea University, 145, Anam-ro, Seongbuk-gu, Seoul,02841, Korea, Republic of
来源：
Vacuum | 2024年 / 226卷
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D O I：
10.1016/j.vacuum.2024.113336
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学科分类号：
摘要：
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