A fast thin-film electret pressure sensor

被引：2
|
作者：
Ahtiainen S.T. [1 ]
Olkkonen H. [1 ]
Tiitta M. [1 ]
机构：
[1] University of Kuopio, Department of Physics, 70211 Kuopio
来源：
Recent Patents on Electrical Engineering | 2010年 / 3卷 / 01期
关键词：
Electret; Instrumentation; Pressure sensors;
D O I：
10.2174/1874476111003010045
中图分类号：
学科分类号：
摘要：
This paper describes a recent progress in electret pressure sensor (EPS) technology. The EPS is constructed from a flexible thin-film electret, which is coated with transversally conducting metallic layers. The EPS can be used to measure pressure changes in wide frequency range and it can be manufactured in different shapes and sizes. Laboratory measurements confirm that using a careful preamplifier design the size of the EPS can be miniaturized to one square millimetre. The calibration procedure confirms that the EPS response is linear and it can be calibrated against the piezoresistive reference sensor. The article presented some promising patents on the thin-film electret pressure sensor technology. © 2010 Bentham Science Publishers Ltd.
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页码：45 / 50
页数：5
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