Effect of plasma-on time on the axial distribution of film thickness in internal diamond-like carbon coating with microwave-excited high-density plasma

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作者
Matsui, Ryosuke [1 ]
Kousaka, Hiroyuki [1 ]
Umehara, Noritsugu [1 ]
机构
[1] Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
关键词
Axial distribution - Axial variations - Diamond-like carbon coatings - DLC coatings - Film density - High density plasmas - Other properties - Stainless steel tube;
D O I
11NA01
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