Effect of plasma-on time on the axial distribution of film thickness in internal diamond-like carbon coating with microwave-excited high-density plasma

被引：0
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作者：
Matsui, Ryosuke [1 ]
Kousaka, Hiroyuki [1 ]
Umehara, Noritsugu [1 ]
机构：
[1] Department of Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
来源：
Japanese Journal of Applied Physics | 2013年 / 52卷 / 11 PART 2期
关键词：
Axial distribution - Axial variations - Diamond-like carbon coatings - DLC coatings - Film density - High density plasmas - Other properties - Stainless steel tube;
D O I：
11NA01
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学科分类号：
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