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- [21] Development and plasma characteristics measurement of planar-type magnetic neutral loop discharge etcher Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (08): : 4572 - 4577
- [23] Design and fabrication of planar-type micro-hotplate with Si-island gas sensor SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, 2012, 345 : 23 - 28
- [27] Excellent thermally stable epitaxial channel for implanted planar-type heterojunction field-effect transistors Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (2 B): : 1198 - 1201
- [30] Three-dimensional based model of a planar SOFC fuelled by biomass gas PROCEEDINGS OF THE 4TH INTERNATIONAL CONFERENCE ON FUEL CELL SCIENCE, ENGINEERING, AND TECHNOLOGY, PTS A AND B, 2006, : 751 - 760