Development of precision positioning workpiece stage in mask moving exposure system

被引：0
|
作者：
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China [1 ]
不详 [2 ]
不详 [3 ]
机构：
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 2007年 / 03期
关键词：
8;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：18 / 22
相关论文
共 50 条
  • [31] Dynamic mass isolation method utilized in self-moving precision positioning stage for improved speed performance
    Liao, Xinxin
    He, Qingbo
    Feng, Zhihua
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2022, 93 (05):
  • [32] A high-precision, magnetically levitated positioning stage
    Owen, Robert Brydon
    Maggiore, Manfredi
    Apkarian, Jacob
    IEEE CONTROL SYSTEMS MAGAZINE, 2006, 26 (03): : 82 - 95
  • [33] Identification of Precision Positioning Stage Based on ARX Model
    Wang, JingShu
    Feng, MingChi
    Zhu, ChangAn
    MECHATRONICS AND APPLIED MECHANICS II, PTS 1 AND 2, 2013, 300-301 : 672 - 675
  • [34] Investigation of a compliant precision positioning stage with folding function
    Xie, Yanlin
    Li, Yangmin
    Cheung, Chifai
    Xiao, Xiao
    Chen, Xigang
    Wang, Ruobing
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2023, 124 (10): : 3343 - 3358
  • [35] Modular kinematics and statics modeling for precision positioning stage
    Ling, Mingxiang
    Cao, Junyi
    Jiang, Zhou
    Lin, Jing
    MECHANISM AND MACHINE THEORY, 2017, 107 : 274 - 282
  • [36] Investigation of a compliant precision positioning stage with folding function
    Yanlin Xie
    Yangmin Li
    Chifai Cheung
    Xiao Xiao
    Xigang Chen
    Ruobing Wang
    The International Journal of Advanced Manufacturing Technology, 2023, 124 : 3343 - 3358
  • [37] High precision positioning stage for micro assembly purposes
    Weck, M
    Petersen, B
    DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 734 - 739
  • [38] New design of precision positioning XY-Stage
    Wang, WL
    Fan, KC
    Wang, HT
    ISTM/2005: 6th International Symposium on Test and Measurement, Vols 1-9, Conference Proceedings, 2005, : 4799 - 4802
  • [39] Pneumatic positioning system for precision assembly
    Freundt, Martin
    Brecher, Christian
    Wenzel, Christian
    Pyschny, Nicolas
    MICRO-ASSEMBLY TECHNOLOGIES AND APPLICATIONS, 2008, 260 : 285 - 295
  • [40] Error Modeling of a Parallel Wedge Precision Positioning Stage
    Zeng, Qiang
    Ehmann, Kornel F.
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2012, 134 (06):
12345