Study on the polishing of GaAs wafer using nano-sized abrasives

被引：0
|
作者：
Department of Material and Engineering, Jiangsu Polytechnic University, Changzhou 213016, China [1 ]
不详 [2 ]
机构：
来源：
Guti Dianzixue Yanjiu Yu Jinzhan | 2006年 / 4卷 / 555-559期
关键词：
Chemical mechanical polishing;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Study on fundamental polishing characteristics in chemical mechanical polishing of gallium arsenide (GaAs) wafer
    Yi, D.
    Li, J.
    Cao, J.
    BULGARIAN CHEMICAL COMMUNICATIONS, 2017, 49 : 113 - 117
  • [22] A Study on Optimization of Nano-sized Bismuth Binding Technology Using a Nafion Solution
    Lee, Gyoung-Ja
    Kim, Chang-Kyu
    Lee, Min-Ku
    Rhee, Chang-Kyu
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2010, 57 (06) : 1667 - 1671
  • [23] Spinning a nano-sized yarn
    Windle, A
    TCE, 2004, (762-63): : 38 - 39
  • [24] Spinning a nano-sized yarn
    Windle, Alan
    Chemical Engineer (London), 2004, (762-763): : 38 - 39
  • [25] Nano-sized imaging of cardiomyocytes
    不详
    NANOMEDICINE, 2010, 5 (03) : 344 - 344
  • [26] Nano-sized conveyor belt
    不详
    R&D MAGAZINE, 2004, 46 (06): : 39 - 39
  • [27] Nano-sized particles and structures
    Riley, DJ
    CHEMISTRY & INDUSTRY, 2001, (18) : 570 - 571
  • [28] Nano-sized cluster nucleation
    Ring, TA
    ADVANCES IN COLLOID AND INTERFACE SCIENCE, 2001, 91 (03) : 473 - 499
  • [29] Nano-sized Advancements in Health
    不详
    R&D MAGAZINE, 2009, 51 (04): : 16 - 16
  • [30] Nano-sized ionic materials
    Dastan, Davoud
    Garmestani, Hamid
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 256
12345