Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature

被引：8
|
作者：
Department of Physics, Lanzhou University, Lanzhou 730000, China [1 ]
机构：
来源：
Chin. Phys. | 2009年 / 2卷 / 773-777期
关键词：
Scanning electron microscopy;
D O I：
10.1088/1674-1056/18/2/060
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学科分类号：
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