Polyimide aerogel-based capacitive pressure sensor with enhanced sensitivity and temperature resistance

被引:3
|
作者
Cheng, Minhan [1 ]
Yuan, Yifei [2 ]
Li, Qianyang [1 ]
Chen, Chuanliang [1 ]
Chen, Jie [1 ]
Tian, Ke [1 ]
Zhang, Mao [1 ]
Fu, Qiang [1 ]
Deng, Hua [1 ]
机构
[1] Sichuan Univ, Coll Polymer Sci & Engn, State Key Lab Polymer Mat Engn, Chengdu 610065, Peoples R China
[2] Sichuan Univ, Pittsburgh Inst, Dept Mat Sci & Engn, Chengdu 610065, Peoples R China
关键词
Capacitive pressure sensor; Polyimide aerogel; Dielectric constant; Proximity sensing; Extreme temperature sensing;
D O I
10.1016/j.jmst.2024.08.015
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The development of intelligent electronic power systems necessitates advanced flexible pressure sensors. Despite improved compressibility through surface micro-structures or bulk pores, conventional capacitive pressure sensors face limitations due to their low dielectric constant and poor temperature tolerance of most elastomers. Herein, we constructed oriented polyimide-based aerogels with mechanical robustness and notable changes in dielectric constant under compression. The enhancement is attributed to the doping of surface-modified dielectric nanoparticles and graphene oxide sheets, which interact with polymer molecular chains. The resulting aerogels, with their excellent temperature resistance, were used to assemble high-performance capacitive pressure sensors. The sensor exhibits a maximum sensitivity of 1.41 kPa-1 over a wide working range of 0-200 kPa. Meanwhile, the sensor can operate in environments up to 150 degrees C during 20 0 0 compression/release cycles. Furthermore, the aerogel-based sensor demonstrates proximity sensing capabilities, showing great potential for applications in non-contact sensing and extreme environment detection. (c) 2024 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
引用
收藏
页码:60 / 69
页数:10
相关论文
共 50 条
  • [41] High Sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology
    Kim, Ji-Hong
    Hong, Sung-Min
    Lee, Jang-Sub
    Moon, Byung-Moo
    Kim, Kunnyun
    2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 703 - +
  • [42] Effects of an additional air chamber on the sensitivity of a capacitive pressure sensor
    Jaehyuk Choi
    Bumkyoo Choi
    Microsystem Technologies, 2017, 23 : 4637 - 4644
  • [43] Effects of an additional air chamber on the sensitivity of a capacitive pressure sensor
    Choi, Jaehyuk
    Choi, Bumkyoo
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (10): : 4637 - 4644
  • [44] Polyimide/MXene hybrid aerogel-based phase-change composites for solar-driven seawater desalination
    Zheng, Zhiheng
    Liu, Huan
    Wu, Dezhen
    Wang, Xiaodong
    Chemical Engineering Journal, 2022, 440
  • [45] Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement
    K. Srinivasa Rao
    W. Samyuktha
    D. Vazad Vardhan
    B. Girish Naidu
    P. Ashok Kumar
    K. Girija Sravani
    Koushik Guha
    Microsystem Technologies, 2020, 26 : 2371 - 2379
  • [46] Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement
    Rao, K. Srinivasa
    Samyuktha, W.
    Vardhan, D. Vazad
    Naidu, B. Girish
    Kumar, P. Ashok
    Sravani, K. Girija
    Guha, Koushik
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020, 26 (08): : 2371 - 2379
  • [47] Microfabricated interdigital capacitive sensor and resonant sensor based on PPy/MoO3 hybrids for sensitivity-enhanced ammonia detection at room temperature
    Xu, Meng-Xin
    Tang, Pan
    Wang, Yan-Xiong
    Liang, Jun-Ge
    Jiang, Yan-Feng
    Yu, Ping-Ping
    Qiang, Tian
    SENSORS AND ACTUATORS B-CHEMICAL, 2024, 404
  • [48] High-Performance Flexible Capacitive Pressure Sensor Based on a Spiked Nickel/Polyimide Composite Nanofiber Membrane
    Xia, Luntao
    Xiao, Wei
    Li, Luoxin
    Liu, Xin
    Zhuang, Qibin
    Huang, Yong
    Lan, Tianhao
    Du, Xiaohui
    Zhao, Yang
    Wu, Dezhi
    ACS SENSORS, 2025, 10 (02): : 1450 - 1460
  • [49] A Novel PDMS Based Capacitive Pressure Sensor
    Riedl, X.
    Bolzmacher, C.
    Wagner, R.
    Bauer, K.
    Schwesinger, N.
    2010 IEEE SENSORS, 2010, : 2255 - 2258
  • [50] A textile-based capacitive pressure sensor
    Sergio, M
    Manaresi, N
    Nicolini, M
    Gennaretti, D
    Tartagni, M
    Guerrieri, R
    SENSOR LETTERS, 2004, 2 (02) : 153 - 160