Scheduling method for dual-blade multi-cluster tools with residency constraints

被引:0
|
作者
机构
[1] Zhou, Binghai
[2] Liu, Mingxiang
[3] Zhou, Shumei
来源
Zhou, B. (bhzhou@tongji.edu.cn) | 1600年 / Harbin Institute of Technology卷 / 46期
关键词
Scheduling algorithms;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule
    Qiao, Yan
    Wu, NaiQi
    Zhou, MengChu
    IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2015, 45 (03): : 472 - 484
  • [42] A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints
    Wu, Naiqi
    Chu, Chengbin
    Chu, Feng
    Zhou, Meng Chu
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2008, 21 (02) : 224 - 237
  • [43] An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints
    Rostami, S
    Hamidzadeh, B
    Camporese, D
    IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 2001, 17 (05): : 609 - 618
  • [44] Efficient and Optimal Scheduling of Time-constrained Hybrid Multi-cluster Tools in Semiconductor Industry
    Yang, Fajun
    Wu, Naiqi
    Qiao, Yan
    Zhou, Mengchu
    2016 IEEE 13TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING, AND CONTROL (ICNSC), 2016,
  • [45] Efficient and Optimal Scheduling of Time-constrained Hybrid Multi-cluster Tools in Semiconductor Industry
    Yang, FaJun
    Wu, NaiQi
    Qiao, Yan
    Zhou, MengChu
    2016 IEEE 13TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING, AND CONTROL (ICNSC), 2016,
  • [46] Scheduling and Control of Startup Process for Single-Arm Cluster Tools With Residency Time Constraints
    Qiao, Yan
    Zhou, MengChu
    Wu, Naiqi
    Zhu, QingHua
    IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2017, 25 (04) : 1243 - 1256
  • [47] Scheduling Close-down Processes Subject to Wafer Residency Constraints for Singlearm Cluster Tools
    Zhu, QingHua
    Zhou, MengChu
    Qiao, Yan
    Wu, NaiQi
    2015 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS (SMC 2015): BIG DATA ANALYTICS FOR HUMAN-CENTRIC SYSTEMS, 2015, : 521 - 526
  • [48] Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations
    Li, Jie
    Qiao, Yan
    Zhang, Siwei
    Li, Zhiwu
    Wu, Naiqi
    Song, Tairan
    APPLIED SCIENCES-BASEL, 2021, 11 (19):
  • [49] Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints
    Li, Xin
    Yang, Wen
    EXPERT SYSTEMS WITH APPLICATIONS, 2025, 269
  • [50] Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model
    Gu, Lei
    Wu, Naiqi
    Li, Tan
    Zhang, Siwei
    Wu, Wenyu
    MATHEMATICS, 2024, 12 (18)