Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films

被引:0
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作者
McDonald, Joel P. [1 ]
Nees, John A. [2 ]
Yalisove, Steve M. [3 ]
机构
[1] Applied Physics Program, University of Michigan, 2477 Randall Laboratory, Ann Arbor, MI 48109-1120, United States
[2] Center for Ultrafast Optical Science, University of Michigan, 2200 Bonisteel Blvd., Ann Arbor, MI 48109, United States
[3] Department of Materials Science and Engineering, University of Michigan, 2200 Hayward Ave., Ann Arbor, MI 48109, United States
来源
Journal of Applied Physics | 2007年 / 102卷 / 06期
关键词
Laser ablation;
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