Ultra-precision diamond turning of microstructure with FTS

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作者：
Center for Space Optics Engineering, School of Astronautics, Harbin Institute of Technology, No.92 Xi Da Zhi Street, Harbin 150001, China [1 ]
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来源：
Int. J. Nanomanufacturing | 2009年 / 4卷 / 297-311期
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D O I：
10.1504/IJNM.2009.027504
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