Simulation study for lifetime distribution of middle-of-line time-dependent dielectric breakdown affected by global and local spacing variations

被引：0

作者：

Info-Powered Energy System Research Center, University of Electro-Communications, Chofu ^{[1
]}

182-8585, Japan

机构：

来源：

Jpn. J. Appl. Phys. | 1600年 / 63卷

关键词：

Distribution shapes - Life-time distribution - Process fluctuations - Simulation studies - Spacing variations - Standard deviation - Time dependent dielectric breakdown - Truncated normal distributions;

D O I：

06JF02

中图分类号：

学科分类号：

摘要：

引用

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