Efficient approach for coupled electrostatic and structural analysis of MEMS via boundary element method and modal expansion

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Department of Mechanical Engineering, Southeast University, Nanjing 210096, China ^{[1
]}

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Jixie Gongcheng Xuebao | 2006年 / 7卷 / 153-158期

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D O I：

10.3901/JME.2006.07.153

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