A novel method for fabrication of plastic microlens array with aperture stops for projection photolithography

被引：0
|
作者：
Chang, Chin-Yuan [1 ]
Yang, Sen-Yeu [1 ]
Wu, Meng-Sheng [1 ]
Jiang, Liang-Ting [1 ]
Wang, Lon A. [2 ]
机构：
[1] Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
[2] Department of Electrical Engineering, Institute of Electro-Optical Engineering, National Taiwan University, Taipei 106, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 5 A期
关键词：
6;
D O I：
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学科分类号：
摘要：
Journal article (JA)
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收藏
页码：2932 / 2935
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