Compact AFM system for rapid and large area surface topography measurement

被引：0
|
作者：
Ju, Bing-Feng [1 ]
Gao, Wei [1 ]
Aoki, Jim [1 ]
Asai, Takemi [1 ]
Kiyono, Satoshi [1 ]
机构：
[1] Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai, 980-8579, Japan
来源：
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | 2006年 / 27卷 / 05期
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页码：525 / 530
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