Nanoindentation of Mg-doped AlGaN thin films

被引：0
|
作者：
机构：
[1] Huang, Chih-Yen
[2] Hsieh, Pei-Ju
[3] Chen, I-Chen
[4] Ke, Wen-Cheng
[5] Yang, Ping-Feng
[6] Jian, Sheng-Rui
来源：
Jian, S.-R. (srjian@gmail.com) | 1600年 / Elsevier Ltd卷 / 593期
关键词：
The effects of Mg-containing precursor flow rate on the nanomechanical characteristics of the Mg-doped AlGaN thin films are investigated by using nanoindentation technique. The Mg-doped AlGaN thin films were deposited on sapphire substrates by metal-organic chemical-vapor deposition (MOCVD) with the various flow rates of 100; 200 and 600 sccm of bis-(cyclopentadienyl)-magnesium (Cp2Mg) precursor. Nanoindentation results revealed apparent discontinuities (so-called multiple pop-ins) in the load-displacement curves; while no discontinuity was observed in the unloading segment of the load-displacement curves. The hardness and Young's modulus of Mg-doped AlGaN thin films measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) method indicated that both mechanical properties increased with increasing the Mg concentration with the hardness and the Young's modulus being increased from 20.62 ± 0.53 to 24.17 ± 0.72 GPa and from 317.48 ± 7.82 to 364.63 ± 17.62 GPa; respectively; as the Mg concentration raised from 100 to 600 sccm. © 2013 Elsevier B.V. All rights reserved;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [21] Synthesis and characterization of Mg-doped ZnO thin-films for photovoltaic applications
    Benali, Hajar
    Hartiti, Bouchaib
    Lmai, Fatima
    Batan, Abdelkrim
    Fadili, Salah
    Thevenin, Philippe
    MATERIALS TODAY-PROCEEDINGS, 2022, 66 : 212 - 216
  • [22] Light emission and microstructure of Mg-doped AlGaN grown on patterned sapphire
    Bell, A
    Liu, R
    Ponce, FA
    Amano, H
    Akasaki, I
    Cherns, D
    APPLIED PHYSICS LETTERS, 2003, 82 (03) : 349 - 351
  • [23] Structural and physical properties of Mg-doped CuCoO2 delafossite thin films
    Chfii, Hasnae
    Bouich, Amal
    Soucase, Bernabe Mari
    Abd-Lefdil, Mohammed
    MATERIALS CHEMISTRY AND PHYSICS, 2023, 306
  • [24] Low-temperature activation of mg-doped GaN with thin Co and Pt films
    Waki, I
    Fujioka, H
    Oshima, M
    Miki, H
    Okuyama, M
    APPLIED SURFACE SCIENCE, 2002, 190 (1-4) : 339 - 342
  • [25] The effects of magnetic field on pulsed laser deposition of Mg-doped ZnO thin films
    Park, Jin Jae
    Song, Jae Kyu
    Ha, Jeong Sook
    Park, Seung Min
    APPLIED SURFACE SCIENCE, 2012, 258 (22) : 8542 - 8547
  • [26] Pulsed laser two-beam deposition of Mg-doped GaN thin films
    Tong, Xing-Lin
    Zheng, Qi-Guang
    Hu, Shao-Liu
    Qin, Ying-Xiong
    Yu, Ben-Hai
    Zhongguo Jiguang/Chinese Journal of Lasers, 2004, 31 (03): : 332 - 336
  • [27] Analytical investigation of activation energy for Mg-doped p-AlGaN
    Hasan, Md. Soyaeb
    Mehedi, Ibrahim Mustafa
    Reza, S. M. Faruk
    Kaysir, Md Rejvi
    Islam, Md Rafiqul
    OPTICAL AND QUANTUM ELECTRONICS, 2020, 52 (07)
  • [28] Understanding the influence of physical properties on the mechanical characteristics of Mg-doped GaN thin films
    Benzarti, Z.
    Khalfallah, A.
    Bougrioua, Z.
    Evaristo, M.
    Cavaleiro, A.
    MATERIALS CHEMISTRY AND PHYSICS, 2023, 307
  • [29] The structural and optical properties of mg-doped zinc oxide multiquantum barrier thin films
    Yang, Jing-Jing
    Du, Wen-Han
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2020, 34 (1-3):
  • [30] Preparation and characterization of Mg-doped ZnO thin films by sol-gel method
    Huang, Kai
    Tang, Zhen
    Zhang, Li
    Yu, Jiangyin
    Lv, Jianguo
    Liu, Xiansong
    Liu, Feng
    APPLIED SURFACE SCIENCE, 2012, 258 (08) : 3710 - 3713
12345