Microstructure metallization using electroless gold plating

被引：0
|
作者：
Yang, Bo [1 ]
Li, Zhi-Hong [1 ]
机构：
[1] National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing 100871, China
来源：
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering | 2007年 / 5卷 / 04期
关键词：
13;
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页码：347 / 350
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