Probe and optical emission spectroscopy measurement of slotted antenna-excited nitrogen discharge plasma

被引:0
|
作者
Toyoyoshi, Reo [1 ]
Sakamoto, Takeshi [1 ]
Matsuura, Haruaki [1 ]
Akatsuka, Hiroshi [1 ]
机构
[1] Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2-12-1-N1-10 O-Okayama, Meguro-ku, Tokyo 152-8550, Japan
关键词
Plasmas;
D O I
暂无
中图分类号
学科分类号
摘要
Journal article (JA)
引用
收藏
页码:3566 / 3572
相关论文
共 50 条
  • [11] Optical emission spectroscopy of electrical discharge machining plasma
    Descoeudres, A
    Hollenstein, C
    Demellayer, R
    Wälder, G
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (06) : 875 - 882
  • [12] EMISSION-SPECTROSCOPY OF NITROGEN IN A SUPERSONIC DISCHARGE - EVIDENCE OF EXCITED NEUTRAL NITROGEN CLUSTERS
    GRAHAM, DJ
    HURST, SM
    LUO, JC
    JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (04): : 2564 - 2567
  • [13] Measurement of ECR-CH4 plasma using Langmuir probe and an optical emission spectroscopy
    Inaba, Hiroshi
    Fujimaki, Shigehiko
    Shinku/Journal of the Vacuum Society of Japan, 1999, 42 (05): : 565 - 571
  • [14] Optical emission spectroscopy of the active species in nitrogen plasma
    Qayyum, A
    Zeb, S
    Naveed, MA
    Ghauri, SA
    Waheed, A
    Zakaullah, M
    PLASMA DEVICES AND OPERATIONS, 2006, 14 (01): : 61 - 70
  • [15] Modification of exposure conditions by the magnetic field configuration in helicon antenna-excited helium plasma
    黄天源
    季佩宇
    黄建军
    于斌
    吴雪梅
    Plasma Science and Technology, 2021, (01) : 63 - 69
  • [16] Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen
    Abdel-Fattah, E.
    Bazavan, M.
    Sugai, H.
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (11)
  • [17] Modification of exposure conditions by the magnetic field configuration in helicon antenna-excited helium plasma
    黄天源
    季佩宇
    黄建军
    于斌
    吴雪梅
    Plasma Science and Technology, 2021, 23 (01) : 63 - 69
  • [18] Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy
    Song, M. A.
    Lee, Y. W.
    Chung, T. H.
    PHYSICS OF PLASMAS, 2011, 18 (02)
  • [19] ABSOLUTE MEASUREMENT OF THE EXCITATION RATE AND DENSITY OF THE EXCITED SPECIES IN AN RF DISCHARGE FROM OPTICAL-EMISSION SPECTROSCOPY
    TOCHIKUBO, F
    MAKABE, T
    MEASUREMENT SCIENCE AND TECHNOLOGY, 1991, 2 (12) : 1133 - 1137
  • [20] CARS spectroscopy and optical interferometry of glow discharge plasma in nitrogen
    Shakhatov, VA
    Gordeev, OA
    HIGH TEMPERATURE, 2006, 44 (02) : 206 - 215