Homogenizing dielectric film using chemical solution deposition method and application to wafer level film preparation

被引：0
|
作者：
Sueshige, Kazutaka [1 ]
Ichiki, Masaaki [2 ,3 ]
Suga, Tadatomo [1 ]
Itoh, Toshihiro [2 ]
机构：
[1] University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan
[2] National Institute of Advanced Industrial Science and Technology, 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan
[3] JST-PRESTO, 7, Goban-Cho, Chiyoda-ku, Tokyo 102-0076, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2013年 / 133卷 / 07期
关键词：
Design of experiments;
D O I：
10.1541/ieejsmas.133.303
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：303 / 308
相关论文
共 50 条
  • [31] Preparation of Thick BaZrO3 Epitaxial Film for Coated Conductors by Polymer-Assisted Chemical Solution Deposition Method
    Zhang, X.
    Zhao, Y.
    Xia, Y. D.
    Cheng, C. H.
    Zhang, Y.
    Zhang, H.
    JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2014, 27 (08) : 1879 - 1884
  • [32] Preparation of Thick BaZrO3 Epitaxial Film for Coated Conductors by Polymer-Assisted Chemical Solution Deposition Method
    X. Zhang
    Y. Zhao
    Y. D. Xia
    C. H. Cheng
    Y. Zhang
    H. Zhang
    Journal of Superconductivity and Novel Magnetism, 2014, 27 : 1879 - 1884
  • [33] THIN-FILM PREPARATION BY CHEMICAL VAPOR-DEPOSITION
    HAMMOND, ML
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 268 - &
  • [34] Preparation of conductive LaNiO3 film electrodes by a simple chemical solution deposition technique for integrated ferroelectric thin film devices
    Bao, DH
    Yao, X
    Wakiya, N
    Shinozaki, K
    Mizutani, N
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (10) : 1217 - 1221
  • [35] Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps
    Kurosawa, K
    Takezoe, N
    Yanagida, H
    Miyano, J
    Motoyama, Y
    Toshikawa, K
    Kawasaki, Y
    Yokotani, A
    APPLIED SURFACE SCIENCE, 2000, 168 (1-4) : 37 - 40
  • [36] Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps
    Kurosawa, K.
    Yanagida, H.
    Takezoe, N.
    Kawasaki, Y.
    Fujita, G.
    Miyano, I.
    Yokotani, A.
    Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2000,
  • [37] Thin film transistor of ZnO fabricated by chemical solution deposition
    Ohya, Y
    Niwa, T
    Ban, T
    Takahashi, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (01): : 297 - 298
  • [38] Electromagnetic Characterization Method for On-Wafer Magnetic Dielectric Thin Film Materials
    Lee, Jun Seok
    Rojas, Roberto G.
    PROCEEDINGS OF THE FOURTH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION, 2010,
  • [39] Influence of Heat Treatment on Structure and Superconducting Properties of YBCO Film by Chemical Solution Deposition Method
    W. T. Wang
    X. F. Yang
    M. H. Pu
    H. Zhang
    C. H. Cheng
    Y. Zhao
    Journal of Superconductivity and Novel Magnetism, 2012, 25 : 39 - 44
  • [40] Influence of Heat Treatment on Structure and Superconducting Properties of YBCO Film by Chemical Solution Deposition Method
    Wang, W. T.
    Yang, X. F.
    Pu, M. H.
    Zhang, H.
    Cheng, C. H.
    Zhao, Y.
    JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2012, 25 (01) : 39 - 44
12345