Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducers

被引：0

作者：

Liechti, Romain ^{[1
]}

Blard, Francois ^{[1
]}

Chatroux, Jean-Remi ^{[1
]}

Bastien, Jean-Claude ^{[1
]}

Lefevre, Aude ^{[1
]}

Lhermet, Helene ^{[1
]}

Fain, Bruno ^{[1
]}

机构：

[1] Univ Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2024年 / 34卷 / 12期

关键词：

AlN; piezoelectric; micromachined; ultrasonic; PMUT; biomedical; RADIATION IMPEDANCE; ARRAY;

D O I：

10.1088/1361-6439/ad902e

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the modeling and characterization of AlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) dedicated to biomedical applications. Our study encompasses detailed analytical modeling of these transducers in both air and water environments. The model is confronted with finite element simulations that account for realistic issues such as imperfect clamping. To validate the model's relevance, we compare its predictions with results from optical, electrical, and acoustical characterization. This comprehensive approach provides a robust framework for understanding PMUT behavior and facilitates efficient modeling of future devices.

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页数：10

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