Fabrication of nanocrystalline silicon gratings embedded within a silicon nitride matrix by femtosecond laser-induced crystallization

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Quantum Photonic Science Research Center, Hanyang University, Seoul 133-791, Korea, Republic of [1 ]
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Jpn. J. Appl. Phys. | / 1 Part 1卷
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Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
Silicon nitride - Electron diffraction - Nanocrystalline silicon - Fabrication - Femtosecond lasers - Photoluminescence spectroscopy - Amorphous silicon - Diffraction gratings - High resolution transmission electron microscopy - Nanoclusters - Chemical vapor deposition - Laser pulses
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