High-speed optical-waveguide integrated single-walled carbon nanotube bolometer

被引：0

作者：

An, P. P. ^{[1
,2
]}

Kovalyuk, V. V. ^{[2
,3
]}

Gladush, Y. G. ^{[4
]}

Golikov, A. D. ^{[1
,2
]}

Semenov, A. V. ^{[1
]}

Komrakova, S. A. ^{[3
]}

Ozhegov, R. V. ^{[2
,3
]}

Mkrtchyan, A. A. ^{[4
]}

Krasnikov, D. V. ^{[4
]}

Nasibulin, A. G. ^{[4
]}

Goltsman, G. N. ^{[3
,5
]}

机构：

[1] Moscow State Pedag Univ, Moscow 119435, Russia

[2] Univ Sci & Technol MISIS, Moscow 119049, Russia

[3] Natl Res Univ Higher Sch Econ, Moscow 101000, Russia

[4] Skolkovo Inst Sci & Technol, Nobel St 3, Moscow 143026, Russia

[5] Russian Quantum Ctr, Skolkovo 143025, Russia

来源：

APPLIED PHYSICS LETTERS | 2024年 / 125卷 / 20期

基金：

俄罗斯科学基金会;

关键词：

SILICON-NITRIDE; PHOTODETECTOR;

D O I：

10.1063/5.0220807

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The rapid development of photonic integrated circuits (PICs) and their applications in various fields of science and technology requires the creation of easy-to-manufacture high-speed integrated detectors. In this work, we fabricated and studied planar waveguide-integrated bolometers based on a thin film of single-walled carbon nanotubes (SWCNTs) on the silicon nitride platform. This bolometer showed good internal responsivity and a high bandwidth >1 GHz. In-depth analysis allowed us to retrieve the main parameters of the SWCNT film that govern the bolometric response that can be difficult to measure directly. The results obtained show a promising prospect of using SWCNT bolometers for PIC applications.

引用

页数：7

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