High-speed optical-waveguide integrated single-walled carbon nanotube bolometer

被引:0
|
作者
An, P. P. [1 ,2 ]
Kovalyuk, V. V. [2 ,3 ]
Gladush, Y. G. [4 ]
Golikov, A. D. [1 ,2 ]
Semenov, A. V. [1 ]
Komrakova, S. A. [3 ]
Ozhegov, R. V. [2 ,3 ]
Mkrtchyan, A. A. [4 ]
Krasnikov, D. V. [4 ]
Nasibulin, A. G. [4 ]
Goltsman, G. N. [3 ,5 ]
机构
[1] Moscow State Pedag Univ, Moscow 119435, Russia
[2] Univ Sci & Technol MISIS, Moscow 119049, Russia
[3] Natl Res Univ Higher Sch Econ, Moscow 101000, Russia
[4] Skolkovo Inst Sci & Technol, Nobel St 3, Moscow 143026, Russia
[5] Russian Quantum Ctr, Skolkovo 143025, Russia
基金
俄罗斯科学基金会;
关键词
SILICON-NITRIDE; PHOTODETECTOR;
D O I
10.1063/5.0220807
中图分类号
O59 [应用物理学];
学科分类号
摘要
The rapid development of photonic integrated circuits (PICs) and their applications in various fields of science and technology requires the creation of easy-to-manufacture high-speed integrated detectors. In this work, we fabricated and studied planar waveguide-integrated bolometers based on a thin film of single-walled carbon nanotubes (SWCNTs) on the silicon nitride platform. This bolometer showed good internal responsivity and a high bandwidth >1 GHz. In-depth analysis allowed us to retrieve the main parameters of the SWCNT film that govern the bolometric response that can be difficult to measure directly. The results obtained show a promising prospect of using SWCNT bolometers for PIC applications.
引用
收藏
页数:7
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