Finite element dynamics analysis of micro-spring in MEMS inertia switch

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State Key Laboratory of Nano/Micro Fabrication Technology, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China [1 ]
不详 [2 ]
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J. Mech. Strength | 2008年 / 4卷 / 586-589期
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