Development of a micro-gripper integrating tri-axial force sensor

Force sensing and control during the process of micro-manipulation without damaging are very important. In order to satisfy this request, a novel micro-gripper integrating tri-axial micro-force sensor, based on the technology of piezoresistive detection, is presented. The calculation experiment verified that the sensor are the high level of intrinsic decoupling of the signals from strain gauge, high resolutions in all three axes and high linearity and repeatability. Its rate load is-0~10 mN with resolution of 2.4 μN in axis x , axis y and with resolution of 4.2 μN in axis z. Thanks to piezoelectronic actuator and two stages flexible hinge amplified structure. Opening-closing value of micro-gripper reaches 300 μm. At last, a micro-grip experiment is finished.