Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

被引：0
|
作者：
Kaleli, B. [1 ]
Nguyen, M.D. [1 ,2 ,3 ]
Schmitz, J. [1 ]
Wolters, R.A.M. [1 ,4 ]
Hueting, R.J.E. [1 ]
机构：
[1] MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, AE Enschede,7500, Netherlands
[2] SolMateS BV, Drienerlolaan 5 (Bldg. 46), NB Enschede,7522, Netherlands
[3] International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No. 1 Dai Co Viet Road, Hanoi, Viet Nam
[4] NXP Semiconductors Eindhoven, High Tech Campus 46, AE Eindhoven,5656, Netherlands
来源：
Microelectronic Engineering | 2014年 / 119卷
关键词：
36;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：16 / 19
相关论文
共 50 条
  • [21] ACOUSTIC LENSES EMPLOYING PZT THIN-FILM TRANSDUCERS
    JEN, CK
    NERON, C
    YI, G
    SAYER, M
    CASTONGUAY, M
    CHEEKE, JDN
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 122 (01): : 21 - 25
  • [22] Ageing of thin-film capacitor structures based on PZT
    Delimova, L. A.
    Grekhov, I. V.
    Mashovets, D. V.
    Titkov, I. E.
    Afanasjev, V. P.
    Afanasjev, P. V.
    Kramar, G. P.
    Petrov, A. A.
    FERROELECTRICS, 2007, 348 : 427 - +
  • [23] STRUCTURAL INVESTIGATIONS ON PZT PRECURSORS FOR THIN-FILM PREPARATION
    KOLB, U
    ABRAHAM, I
    GUTWERK, D
    ERTEL, TS
    HORNER, W
    BERTAGNOLLI, H
    MERKLEIN, S
    SPORN, D
    PHYSICA B, 1995, 208 (1-4): : 601 - 603
  • [24] FATIGUE MECHANISMS IN THIN-FILM PZT MEMORY MATERIALS
    GUTTLER, B
    BISMAYER, U
    GROVES, P
    SALJE, E
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1995, 10 (03) : 245 - 248
  • [25] FABRICATION AND CHARACTERIZATION OF PZT THIN-FILM VIBRATORS FOR MICROMOTORS
    MURALT, P
    KOHLI, M
    MAEDER, T
    KHOLKIN, A
    BROOKS, K
    SETTER, N
    LUTHIER, R
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (02) : 157 - 165
  • [26] Thin-film PZT lateral actuators with extended stroke
    Oldham, Kenn R.
    Pulskamp, Jeffrey S.
    Polcawich, Ronald G.
    Dubey, Madan
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (04) : 890 - 899
  • [27] THIN-FILM ELECTRODE FABRICATION TECHNIQUES
    WHITE, RL
    ROBERTS, LA
    COTTER, NE
    KWON, OH
    ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1983, 405 (JUN) : 183 - 190
  • [28] STRUCTURE OF GOLD TIN THIN-FILM COUPLES
    SHARMA, SK
    SINGH, MP
    MALHOTRA, GL
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 128 (02): : 407 - 417
  • [29] Tin oxide transparent thin-film transistors
    Presley, RE
    Munsee, CL
    Park, CH
    Hong, D
    Wager, JF
    Keszler, DA
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (20) : 2810 - 2813
  • [30] Multilayer thin-film stacks with steplike spatial beam shifting
    Gerken, M
    Miller, DAB
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2004, 22 (02) : 612 - 618
12345