Effect of substrate thickness on quasi-longitudinal leaky surface acoustic wave propagation on quartz

被引：0
|
作者：
Oshio, Masahiro [1 ]
Kanna, Shigeo [1 ]
Iizawa, Keigo [2 ]
机构：
[1] Seiko Epson Corporation, 3-3-5 Owa, Suwa, Nagano 392-8502, Japan
[2] Epson Toyocom Corporation, 421-8 Hino, Hino, Tokyo 191-8501, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 5 B期
关键词：
Propagation properties of a quasi-longitudinal leaky surface acoustic wave (QLL-SAW) on rotated-Y cut quartz are described. It is found that by reducing the relative thickness of the quartz substrate; i.e; the ratio of the substrate thickness to the SAW wavelength; the Q-value of a QLL-SAW resonator can be improved. Its phase velocity is about 5704 m/s; which is close to the velocity of a longitudinal BAW (5750m/s) and about 1.8 times that of a Rayleigh SAW. Propagation characteristics are simulated by a finite element method. The results obtained indicate that many guided wave modes exist near the velocity of the longitudinal BAW and strongly couple to QLL-SAW modes. Experimental results show that these guided wave modes affect QLL-SAW propagation and deteriorate resonator Q-values. By reducing the relative thickness of the quartz substrate; the frequency difference between the QLL-SAW and the guided wave modes is increased; which weakens the coupling. As a result; 700 MHz SAW resonators having a Q-value of more than 8000 are realized. © 2006 The Japan Society of Applied Physics;
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页码：4671 / 4674
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