Effect of substrate thickness on quasi-longitudinal leaky surface acoustic wave propagation on quartz

被引：0

作者：

Oshio, Masahiro ^{[1
]}

Kanna, Shigeo ^{[1
]}

Iizawa, Keigo ^{[2
]}

机构：

[1] Seiko Epson Corporation, 3-3-5 Owa, Suwa, Nagano 392-8502, Japan

[2] Epson Toyocom Corporation, 421-8 Hino, Hino, Tokyo 191-8501, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 5 B期

关键词：

Propagation properties of a quasi-longitudinal leaky surface acoustic wave (QLL-SAW) on rotated-Y cut quartz are described. It is found that by reducing the relative thickness of the quartz substrate; i.e; the ratio of the substrate thickness to the SAW wavelength; the Q-value of a QLL-SAW resonator can be improved. Its phase velocity is about 5704 m/s; which is close to the velocity of a longitudinal BAW (5750m/s) and about 1.8 times that of a Rayleigh SAW. Propagation characteristics are simulated by a finite element method. The results obtained indicate that many guided wave modes exist near the velocity of the longitudinal BAW and strongly couple to QLL-SAW modes. Experimental results show that these guided wave modes affect QLL-SAW propagation and deteriorate resonator Q-values. By reducing the relative thickness of the quartz substrate; the frequency difference between the QLL-SAW and the guided wave modes is increased; which weakens the coupling. As a result; 700 MHz SAW resonators having a Q-value of more than 8000 are realized. © 2006 The Japan Society of Applied Physics;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：4671 / 4674

共 50 条

[1] Effect of substrate thickness on quasi-longitudinal leaky surface acoustic wave propagation on quartz
Oshio, Masahiro
Kanna, Shigeo
Ilzawa, Keigo
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B): : 4671 - 4674
[2] Effect of substrate thickness on quasi-longitudinal leaky SAW propagation on quartz
Oshio, M
Kanna, S
Iizawa, K
Corporation, SE
2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4, 2005, : 1880 - 1883
[3] Propagation properties of quasi-longitudinal leaky surface acoustic wave on Y-rotated cut quartz substrates
Tong, Xiao-Jun
Wang, Wei-Biao
Zhou, Ran
Zhang, De
Qin, Hou-Rong
2000, IOP Publishing Ltd (17):
[4] Novel propagation direction of quasi-longitudinal leaky surface acoustic wave on quartz and its potential as liquid sensors
Tong, XJ
Zhang, D
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 78 (2-3) : 160 - 162
[5] Novel propagation direction of quasi-longitudinal leaky surface acoustic wave on quartz and its potential as liquid sensors
Tong, Xiaojun
Zhang, De
Sensors and Actuators, A: Physical, 1999, 78 (02): : 160 - 162
[6] Propagation properties of quasi-longitudinal leaky surface acoustic wave on Y-rotated cut quartz substrates
Tong, XJ
Wang, WB
Zhou, R
Zhang, D
Qin, HR
CHINESE PHYSICS LETTERS, 2000, 17 (09) : 678 - 679
[7] Study of propagation properties of quasi-longitudinal leaky surface acoustic wave propagating on Y-rotated cut quartz substrates
Zhang, D
Tong, XJ
Qin, HR
1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 1999, : 321 - 324
[8] EXCITATION OF A QUASI-LONGITUDINAL LEAKY WAVE
VASKOVA, VI
VIKTOROV, IA
SOVIET PHYSICS ACOUSTICS-USSR, 1981, 27 (05): : 402 - 405
[9] Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate
Suzuki, Masashi
Sawada, Naoya
Kakio, Shoji
JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SG)
[10] The behavior of quasi-longitudinal leaky surface waves in crystals
Naumenko, NF
1996 IEEE ULTRASONICS SYMPOSIUM, PROCEEDINGS, VOLS 1 AND 2, 1996, : 107 - 110

← 1 2 3 4 5 →