Realization of interface between MEMS process simulation and finite element software

被引：0
|
作者：
Jian, Fu-Jian [1 ]
Li, Wei-Hua [1 ]
机构：
[1] Key Laboratory of MEMS of the Ministry of Education, Department of Electronic Science and Engineering, Southeast University, Nanjing 210096, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2009年 / 17卷 / 07期
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摘要：
8
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页码：1646 / 1650
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