[1] Louisiana State University, Baton Rouge, LA, United States
[2] Applied Materials/Semitool, Kalispell, MT, United States
[3] Tohoku University, Sendai, Japan
[4] Berkeley Polymer Technology, Hayward, CA, United States
[5] S/C Technology Consulting, Poughkeepsie, NY, United States
[6] Fraunhofer Institute IZM Münich, Münich, Germany
[7] IBM, Stormville, NY, United States
[8] Eindhoven University of Technology, Eindhoven, Netherlands