Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen

被引：0
|
作者：
Guillén, C. [1 ]
Herrero, J. [1 ]
机构：
[1] Departamento de Energía, CIEMAT, Avda Complutense 22, 28040 Madrid, Spain
来源：
Journal of Applied Physics | 2007年 / 101卷 / 07期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [11] Electrical and structural properties of tin-doped indium oxide films deposited by DC sputtering at room temperature
    Song, Pung Keun
    Shigesato, Yuzo
    Kamei, Masayuki
    Yasui, Itaru
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (5 A): : 2921 - 2927
  • [12] Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering
    Yang, Chih-hao
    Lee, Shih-chin
    Lin, Tien-chai
    Chen, Suz-cheng
    THIN SOLID FILMS, 2008, 516 (08) : 1984 - 1991
  • [13] Electrical and structural properties of tin-doped indium oxide films deposited by DC sputtering at room temperature
    Song, PK
    Shigesato, Y
    Kamei, M
    Yasui, I
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5A): : 2921 - 2927
  • [14] Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets
    Zhang, Wei
    Zhu, Guisheng
    Zhi, Li
    Yang, Huijuan
    Yang, Zupei
    Yu, Aibing
    Xu, Huarui
    VACUUM, 2012, 86 (08) : 1045 - 1047
  • [15] Optical, structural and electrical properties of tin oxide films prepared by magnetron sputtering
    Karapatnitski, IA
    Mit', KA
    Mukhamedshina, DM
    Beisenkhanov, NB
    SURFACE & COATINGS TECHNOLOGY, 2002, 151 : 76 - 81
  • [16] Grain structure and electrical properties of transparent indium oxide thin films prepared by rf magnetron sputtering
    Jun Y.-S.
    Kim S.-S.
    Defect and Diffusion Forum, 2020, 400 : 170 - 175
  • [17] Effects of air annealing on the optical, electrical, and structural properties of indium-tin oxide thin films
    Trejo-Cruz, C.
    Mendoza-Galvan, A.
    Lopez-Beltran, A. M.
    Gracia-Jimenez, M.
    THIN SOLID FILMS, 2009, 517 (16) : 4615 - 4620
  • [18] Photoelectrochemical properties of nitrogen-doped indium tin oxide thin films prepared by reactive DC magnetron sputtering
    Wu, Kee-Rong
    Yeh, Chung-Wei
    Hung, Chung-Hsuang
    Cheng, Li-Hsun
    Chung, Chih-Yuan
    THIN SOLID FILMS, 2009, 518 (05) : 1581 - 1584
  • [19] Structure, optical and electrical properties of indium tin oxide ultra thin films prepared by jet nebulizer spray pyrolysis technique
    Thirumoorthi, M.
    Prakash, J. Thomas Joseph
    JOURNAL OF ASIAN CERAMIC SOCIETIES, 2016, 4 (01): : 124 - 132
  • [20] Electrical and optical properties of silver doped indium oxide thin films prepared by reactive DC magnetron sputtering
    Subrahmanyam, A.
    Barik, Ullash Kumar
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2006, 67 (07) : 1518 - 1523
12345