Interferometric measurement of workpiece flatness in ultra-precision flycutting

被引：15
|
作者：
Marsh, Eric [1 ,4 ,5 ]
Arneson, David [2 ,6 ]
Doren, Matthew Van [3 ,7 ,8 ]
Blystone, Scott [1 ,9 ]
机构：
[1] Penn State University, University Park, PA, United States
[2] Professional Instruments Company, Minneapolis, MN, United States
[3] Van Doren Designs, LLC, Southbury, CT, United States
[4] Department of Mechanical Engineering
[5] Machine Dynamics Research Lab., PA
[6] Professional Instruments Co.
[7] ASML
[8] Zygo
[9] Bettis Atomic Power Laboratory
来源：
Sensor Review | 2006年 / 26卷 / 03期
关键词：
D O I：
10.1108/02602280610675492
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：209 / 217
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