共 50 条
- [22] GaN Films Deposited by DC Reactive Magnetron Sputtering Shigesato, Y. (yuzo@chem.aoyama.ac.jp), 1600, Japan Society of Applied Physics (43):
- [23] GaN films deposited by DC reactive magnetron sputtering JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2004, 43 (2A): : L164 - L166
- [24] Study on transparent conducting ZnO:Al films deposited on organic substrate by RF magnetron sputtering Taiyangneng Xuebao/Acta Energiae Solaris Sinica, 1999, 20 (02): : 200 - 203
- [30] Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (04): : 842 - 845