Wafer level hermetic packaging based on electroplating Cu-Sn alloy films

被引:0
|
作者
机构
[1] Du, Li-Dong
[2] Zhao, Zhan
[3] Fang, Zhen
[4] Sun, Xue-Jin
[5] Wang, Xiao-Lei
来源
Du, Li-Dong | 1600年 / Chinese Academy of Sciences卷 / 22期
关键词
X ray diffraction analysis;
D O I
10.3788/OPE.20142211.3044
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] Electroplating of Cu/Sn layers for hermetic encapsulation for vacuum applications
    Rissing, L.
    Wurz, M. C.
    Cvetkovic, S.
    Bach, F.
    MAGNETIC MATERIALS, PROCESSES, AND DEVICES 12, 2012, 50 (10): : 207 - 216
  • [22] Hermetic Packaging Based on Cu-Sn and Au-Au Dual Bonding for High-Temperature Graphene Pressure Sensor
    Wang, Junqiang
    Zhang, Haikun
    Chen, Xuwen
    Li, Mengwei
    MICROMACHINES, 2022, 13 (08)
  • [23] Wafer-Level Hermetic Bonding Using Sn/In and Cu/Ti/Au Metallization
    Yu, Da-Quan
    Yan, Li Ling
    Lee, Chengkuo
    Choi, Won Kyoung
    Thew, Serene
    Foo, Chin Keng
    Lau, John H.
    IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, 2009, 32 (04): : 926 - 934
  • [24] Wafer-level vacuum packaging technology based on selective electroplating
    Topart, P
    Leclair, S
    Alain, C
    Jerominek, H
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IX, 2004, 5342 : 26 - 34
  • [25] DISCONTINUOUS PRECIPITATION IN A CU-SN ALLOY
    TSUBAKINO, H
    METALLOGRAPHY, 1984, 17 (04): : 371 - 382
  • [26] Modeling and Simulation of Cu TSV electroplating for wafer-level MEMS vacuum packaging
    Shi, Shuai
    Wang, Xuefang
    Xu, Chunlin
    Yuan, Jiaojiao
    Fang, Jing
    Jiang, Shengwei
    Liu, Sheng
    2013 14TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2013, : 68 - 72
  • [27] Fabrication of Sn-Cu Alloy Solder by Pulse Electroplating on the Metalized Si Wafer
    Tang, Wengming
    Hu, Yang
    Huang, Shubin
    METALS AND MATERIALS INTERNATIONAL, 2012, 18 (01) : 177 - 183
  • [28] Fabrication of Sn-Cu alloy solder by pulse electroplating on the metalized Si wafer
    Wengming Tang
    Yang Hu
    Shubin Huang
    Metals and Materials International, 2012, 18 (1) : 177 - 183
  • [29] Optimized Cu-Sn Wafer-Level Bonding Using Intermetallic Phase Characterization
    Thi-Thuy Luu
    Ani Duan
    Knut E. Aasmundtveit
    Nils Hoivik
    Journal of Electronic Materials, 2013, 42 : 3582 - 3592
  • [30] Optimized Cu-Sn Wafer-Level Bonding Using Intermetallic Phase Characterization
    Thi-Thuy Luu
    Duan, Ani
    Aasmundtveit, Knut E.
    Hoivik, Nils
    JOURNAL OF ELECTRONIC MATERIALS, 2013, 42 (12) : 3582 - 3592