Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation

被引：0
|
作者：
Lu, Qiu Yuan [1 ,2 ]
Li, Liu He [1 ,2 ]
Fu, Ricky K. Y. [1 ]
Chu, Paul K. [1 ]
机构：
[1] Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong
[2] Department 702, School of Mechanical and Automation Engineering, Beijing University of Aeronautics and Astronautics, Beijing, China
来源：
Journal of Applied Physics | 2008年 / 104卷 / 04期
关键词：
Ion implantation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [41] Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation
    Zeng, ZM
    Tian, XB
    Chu, PK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (01): : 175 - 179
  • [42] Numerical simulation of magnetic-field-enhanced plasma immersion ion implantation in cylindrical geometry
    Kostov, Konstantin G.
    Barroso, Joaquim J.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2006, 34 (04) : 1127 - 1135
  • [43] STABILITY OF A GLOW-DISCHARGE PLASMA IN A VARIABLE ELECTRIC-FIELD
    SHAPIRO, GI
    HIGH TEMPERATURE, 1980, 18 (01) : 36 - 41
  • [44] AZO work function enhanced by oxygen plasma immersion ion implantation
    Li, Zebin
    Li, Lianbi
    Zhang, Guoqing
    Song, Lixun
    Tu, Zheyan
    Han, Chao
    VACUUM, 2023, 212
  • [45] Effect of electron magnetic trapping in a plasma immersion ion implantation system
    K. G. Kostov
    M. A. Algatti
    E. J.D.M. Pillaca
    M. E. Kayama
    R. P. Mota
    R. Y. Honda
    The European Physical Journal D, 2009, 54 : 205 - 209
  • [46] Effect of electron magnetic trapping in a plasma immersion ion implantation system
    Kostov, K. G.
    Algatti, M. A.
    Pillaca, E. J. D. M.
    Kayama, M. E.
    Mota, R. P.
    Honda, R. Y.
    EUROPEAN PHYSICAL JOURNAL D, 2009, 54 (02): : 205 - 209
  • [47] Plasma-source ion implantation compared with glow-discharge plasma nitriding of stainless steel
    Günzel, R
    Betzl, M
    Alphonsa, I
    Ganguly, B
    John, PI
    Mukherjee, S
    SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 307 - 309
  • [48] Investigation of Plasma Immersion Ion Implantation Process in Magnetic Mirror Geometry
    de Dios Mitma Pillaca, Elver Juan
    Ueda, Mario
    Kostov, Konstantin Georgiev
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 3049 - 3055
  • [49] Modeling of incident particle energy distribution in plasma immersion ion implantation
    Tian, XB
    Kwok, DTK
    Chu, PK
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (09) : 4961 - 4966
  • [50] Energy distribution of boron ions during plasma immersion ion implantation
    Qin, Shu
    Chan, Chung
    McGruer, Nicol E.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01): : 1 - 6
12345