Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation

被引：0
|
作者：
Lu, Qiu Yuan [1 ,2 ]
Li, Liu He [1 ,2 ]
Fu, Ricky K. Y. [1 ]
Chu, Paul K. [1 ]
机构：
[1] Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong
[2] Department 702, School of Mechanical and Automation Engineering, Beijing University of Aeronautics and Astronautics, Beijing, China
来源：
Journal of Applied Physics | 2008年 / 104卷 / 04期
关键词：
Ion implantation;
D O I：
暂无
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学科分类号：
摘要：
Journal article (JA)
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