Oriented lapping of SiC wafers

被引：0
|
作者：
Zhao, Shu-Feng [1 ]
Chen, Zhi-Ming [1 ]
Pan, Pan [1 ]
Wang, Huan-Huan [1 ]
机构：
[1] Department of Electronic Engineering, Xi'an University of Technology, Xi'an 710048, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2010年 / 39卷 / 02期
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页码：365 / 368
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