Photosensitive materials based on copolymers of vinyl cyclopropyl ether with maleic anhydride

被引：0
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作者：
Shakhnazarli, R.Z. [1 ]
Alieva, A.A. [1 ]
Nazaraliev, Kh.G. [1 ]
Guliev, A.M. [1 ]
机构：
[1] Institute of Polymeric Materials, National Academy of Sciences of Azerbaijan, Sumgaiyt, Azerbaijan
来源：
| 1600年 / Maik Nauka-Interperiodica Publishing卷 / 81期
关键词：
Copolymers prepared from vinyl cyclopropyl ether and maleic anhydride were modified with allyl alcohol; and the products obtained were thermally cross-linked with styrene. Photoresists were prepared from these copolymers; and their photolithographic parameters were determined. © 2008 MAIK Nauka;
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