Temperature comparison for non-equilibrium atmospheric pressure Ar and He plasma jets

被引：0
|
作者：
Duan, Xiaojin [1 ,2 ]
Xu, Xiangyu [3 ]
Zhao, Lingli [2 ]
Wang, Shouguo [3 ]
机构：
[1] Physics Departmennt, Sichuan University, Chengdu 610064, China
[2] Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100010, China
[3] Academy of Opto-electronics, Chinese Academy of Sciences, Beijing 100010, China
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 4 A期
关键词：
A cold plasma jet; which is operated with radio frequency (RF) power and produces a stable cold plasma stream at atmospheric pressure; has been developed. A thermal couple was used to measure the temperature distributions of the Ar and He plasma streams; and the electrical measurements of the discharges were conducted by using a high voltage probe and a current probe for explaining the temperature characteristics. In addition; two relatively optimal gas flow arrangements for Ar and He discharges were found respectively; which might be helpful in practical applications. ©2007 The Japan Society of Applied Physics;
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摘要：
Journal article (JA)
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页码：1700 / 1703
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