Piezoelectric response to pressure of aluminum nitride thin films prepared on nickel-based superalloy diaphragms

被引：0
|
作者：
Ohshima, Ichiro [1 ]
Akiyama, Morito [1 ]
Kakami, Akira [1 ]
Tabaru, Tatsuo [1 ]
Kamohara, Toshihiro [1 ]
Ooishi, Yasunobu [1 ]
Noma, Hiroaki [1 ]
机构：
[1] On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), 807-1 Shuku-machi, Tosu, Saga 841-0052, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 6 A期
关键词：
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摘要：
Journal article (JA)
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页码：5169 / 5173
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