Microtribology of silicon, oxide, and carbide surfaces

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Technische Universität Ilmenau, Institut für Physik, Institut für Mikro-und Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany [1 ]
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TriboTest | 2006年 / 2卷 / 175-184期
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10.1002/tt.15
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