Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector

被引:0
|
作者
Cheng, Teng [1 ]
Zhang, Qingchuan [1 ]
Chen, Dapeng [2 ]
Shi, Haitao [1 ]
Gao, Jie [1 ]
Wu, Xiaoping [1 ]
机构
[1] CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China
[2] Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China
来源
Journal of Applied Physics | 2009年 / 105卷 / 03期
基金
中国国家自然科学基金;
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摘要
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