Three-dimension photonic crystals fabrication using SU-8 photoresist

被引：0
|
作者：
Zhang, Xiao-Yu [1 ]
Gao, Hong-Tao [1 ]
Zhou, Chong-Xi [1 ]
Liu, Qiang [1 ]
Xing, Ting-Wen [1 ]
Yao, Han-Min [1 ]
机构：
[1] State Key Laboratory of Optical Technologies for Microfabrication, the Institute of Optics and Electronics, the Chinese Academy of Sciences, Chengdu 610209, China
来源：
Guangdian Gongcheng/Opto-Electronic Engineering | 2007年 / 34卷 / 08期
关键词：
9;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：28 / 31
相关论文
共 50 条
  • [1] Fabrication and tests of a three-dimensional microsupercapacitor using SU-8 photoresist as the separator
    Xing, Hexin
    Wang, Xiaohong
    Shen, Caiwei
    Li, Siwei
    MICRO & NANO LETTERS, 2012, 7 (12) : 1166 - 1169
  • [2] Fabrication of the Superhydrophobic Surface Using SU-8 Photoresist with Black Silicon
    Lee, Sang Eon
    Lee, Dongjin
    Kim, Jin-Ha
    Lee, Kang Won
    Lee, Kwang-Cheol
    Hong, Seong Uk
    Lee, Seung S.
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 11, 2012, : 407 - 410
  • [3] Three-dimensional spiral architecture photonic crystals obtained in a negative photoresist SU-8 by direct laser writing
    Seet, K.K. (himawari@eng.hokudai.ac.jp), (Institute of Electrical and Electronics Engineers Inc., Piscataway, United States):
  • [4] Three-dimensional spiral architecture photonic crystals obtained in a negative photoresist SU-8 by direct laser writing
    Seet, KK
    Mizeikis, V
    Juodkazis, S
    Misawa, H
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 1035 - 1036
  • [5] Photonic molecules defined by SU-8 photoresist strips on a photonic crystal waveguide
    Lennon, Stephen A.
    Brossard, Frederic S. F.
    Nuttall, Luke P.
    Wu, Jiang
    Griffiths, Jonathan
    Taylor, Robert A.
    OPTICS EXPRESS, 2018, 26 (24): : 32332 - 32345
  • [6] Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement
    Chen, Wei-Chih
    Wu, Tsung-Ju
    Wu, Wen-Jong
    Su, Guo-Dung J.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (06)
  • [7] Two-photon laser lithography of photonic microstructures in photoresist SU-8
    Mizeikis, V
    Seet, KK
    Juodkazis, S
    Jarutis, V
    Misawa, H
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 1037 - 1038
  • [8] Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist
    Lee, Jaekul
    Shin, Hyunjung
    Kim, Sungdong
    Hong, Seungbum
    Chung, Juhwan
    Park, Hongsik
    Moon, Jooho
    2003, Japan Society of Applied Physics (42):
  • [9] Fabrication of optical structures using SU-8 photoresist and chemically assisted ion beam etching
    Pang, L
    Nakagawa, W
    Fainman, Y
    OPTICAL ENGINEERING, 2003, 42 (10) : 2912 - 2917
  • [10] Fabrication of atomic force microscope probe with low spring constant using SU-8 photoresist
    Lee, J
    Shin, H
    Kim, S
    Hong, S
    Chung, J
    Park, H
    Moon, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2003, 42 (10A): : L1171 - L1174
12345