Overview of On-Machine Metrology with Probing Method

被引：0
|
作者：
Takaya Y.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2024年 / 90卷 / 05期
关键词：
in-process measurement; non-contact measurement; on-machine measurement; optical measurement; precision metrology; probing method; smart-sensing;
D O I：
10.2493/jjspe.90.387
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：387 / 393
页数：6
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