Influence of pore volume and heating process on preparation of aluminum nitride powder by carbothermal reduction method

被引:0
|
作者
Wei, Juan [1 ]
Wang, Yujun [1 ]
Luo, Guangsheng [1 ]
机构
[1] State Key Laboratory of Chemical Engineering, Department of Chemical Engineering, Tsinghua University, Beijing,100084, China
来源
Huagong Xuebao/CIESC Journal | 2021年 / 72卷 / 02期
关键词
III-V semiconductors - Nitrogen compounds - Nitridation - Carbothermal reduction - Particle size;
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中图分类号
学科分类号
摘要
Carbothermal reduction nitriding method is the main method for industrial preparation of high-purity aluminum nitrite (AlN) powder. In this paper, the aluminum sources with different pore volumes were synthesized through a micro-reactor, and the influence of the pore volume and micro-morphology of the precursor on the AlN powder was systematically investigated, and the activity of the selected precursor was verified by kinetic simulation. At the same time, the influence of the heating process of the nitriding reaction was also explored. Finally, through optimizing the aluminum source and heating process, the AlN powder with a purity of more than 99% was obtained, with an average particle size of about 150 nm and element O content of 0.55%. © 2021, Editorial Board of CIESC Journal. All right reserved.
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页码:1156 / 1168
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